Miniaturized differential scanning calorimeter with an integrated mass sensing system: first steps
نویسندگان
چکیده
Abstract. In this paper, the first steps towards integrating a mass sensing system into an existing miniaturized ceramic DSC (differential scanning calorimetry) chip are presented. A vibration setup is developed based on mass-dependent change in frequency of as oscillating cantilever. simulation model reveals that resolution measurement can be improved by reducing thickness. study, different methods (acoustic, optical, and piezoresistive) investigated. Three complete systems set up evaluated with regard to their integration chip. All presented show promising results already allow measurements 100 µg.
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ژورنال
عنوان ژورنال: Journal of Sensors and Sensor Systems
سال: 2023
ISSN: ['2194-8771', '2194-878X']
DOI: https://doi.org/10.5194/jsss-12-9-2023